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Replication Data for: Deeply Sub-Wavelength Non-Contact Optical Metrology of Sub-Wavelength Objects
Jun 3, 2021
Carolina Rendón-Barraza; Eng Aik Chan; Guanghui Yuan; Giorgio Adamo; Tanchao Pu; Nikolay I. Zheludev, 2021, "Replication Data for: Deeply Sub-Wavelength Non-Contact Optical Metrology of Sub-Wavelength Objects", https://doi.org/10.21979/N9/ZFLGM2, DR-NTU (Data), V1, UNF:6:drmiOp5v6vhTus4wr6GScg== [fileUNF]
This dataset contains the experimental data for the paper: Deeply Sub-Wavelength Non-Contact Optical Metrology of Sub-Wavelength Objects.
AllAverageProfiles.mat
Jun 3, 2021 - Replication Data for: Deeply Sub-Wavelength Non-Contact Optical Metrology of Sub-Wavelength Objects
MATLAB Data - 26.1 MB - MD5: 7aa1faa9e227598c7ff4cd1e5b09e0a1
Experiment_positions_CADTrained.tab
Jun 3, 2021 - Replication Data for: Deeply Sub-Wavelength Non-Contact Optical Metrology of Sub-Wavelength Objects
Tabular Data - 158.2 KB - 101 Variables, 84 Observations - UNF:6:7ounWXLCkJg0iCHBHdr+QQ==
Experiment_widths_CADTrained.tab
Jun 3, 2021 - Replication Data for: Deeply Sub-Wavelength Non-Contact Optical Metrology of Sub-Wavelength Objects
Tabular Data - 161.9 KB - 101 Variables, 84 Observations - UNF:6:QKPKuw4H9O92ibb6qcAZjA==
Experiment_widths_SEMTrained.tab
Jun 3, 2021 - Replication Data for: Deeply Sub-Wavelength Non-Contact Optical Metrology of Sub-Wavelength Objects
Tabular Data - 162.0 KB - 101 Variables, 84 Observations - UNF:6:NKMVwf3QaHmWOABtuPUTEA==
Experiment_widths_SEMTrained_TotalIntensity.tab
Jun 3, 2021 - Replication Data for: Deeply Sub-Wavelength Non-Contact Optical Metrology of Sub-Wavelength Objects
Tabular Data - 161.9 KB - 101 Variables, 84 Observations - UNF:6:7OceWn+2KKi5TI1zAV6Vtg==
Simulation_widths_ASMTrained-1.tab
Jun 3, 2021 - Replication Data for: Deeply Sub-Wavelength Non-Contact Optical Metrology of Sub-Wavelength Objects
Tabular Data - 162.0 KB - 101 Variables, 84 Observations - UNF:6:zPO8+k+sWwHaru8GA7b1Dw==
Simulation_widths_ASMTrained.xlsx
Jun 3, 2021 - Replication Data for: Deeply Sub-Wavelength Non-Contact Optical Metrology of Sub-Wavelength Objects
MS Excel Spreadsheet - 307.1 KB - MD5: a18f872d5dbb2c53860af0534abcc36c
slit_names_all.txt
Jun 3, 2021 - Replication Data for: Deeply Sub-Wavelength Non-Contact Optical Metrology of Sub-Wavelength Objects
Plain Text - 8.7 KB - MD5: 7ab3cfadfd1f0dce3b7d63a5b2829fc6
slit_names_validation.txt
Jun 3, 2021 - Replication Data for: Deeply Sub-Wavelength Non-Contact Optical Metrology of Sub-Wavelength Objects
Plain Text - 888 B - MD5: cea4abdf892d76ab6c42e0216aa9194d
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