High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications (doi:10.21979/N9/VFQG8Q)

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Part 2: Study Description
Part 3: Data Files Description
Part 4: Variable Description
Part 5: Other Study-Related Materials
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High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications

doi:10.21979/N9/VFQG8Q

DR-NTU (Data)

2020-03-25

1

Vu, Tuan Duc; Liu, Shiyu; Zeng, Xianting; Li, Chuanchang; Long, Yi, 2020, "High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications", https://doi.org/10.21979/N9/VFQG8Q, DR-NTU (Data), V1, UNF:6:55mpYUyaaXzo7I3hUHx8Pg== [fileUNF]

High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications

doi:10.21979/N9/VFQG8Q

Vu, Tuan Duc (Nanyang Technological University)

Liu, Shiyu (Singapore Institute of Manufacturing Technology)

Zeng, Xianting (Singapore Institute of Manufacturing Technology)

Li, Chuanchang (Changsha University of Science and Technology)

Long, Yi (Nanyang Technological University)

Bruker Nanoscope

Agilent WinUV

Bruker EVA

Renishaw WiRE

Academic Research Fund Tier 1 RG200/17

Campus for Research Excellence and Technological Enterprise (CREATE) program

DR-NTU (Data)

Long Yi

Vu Tuan Duc

2020-03-25

https://doi.org/10.21979/N9/VFQG8Q

Engineering, Engineering, vanadium dioxide, HiPIMS, smart windows

Vanadium dioxide (VO2) is one of the most promising thermochromic materials for smart windows application because of its ability to modulate infrared radiation (IR) by reversibly transform from semiconductor-like monoclinic VO2 (M) to metallic rutile VO2 (R) above its transition temperature (τc). Despite the promising potential, VO2 has not been commercialized due to various technical difficulties which hinder its feasibilities outside of laboratories environment. One of those is the efficiency of high quality VO2 thin-film fabrication process. In this paper, we presented a method utilizing high-power impulse magnetron sputtering (HiPIMS) to deposit VO2 thin-film on a commercial material such as soda-lime glass substrate with a respectable deposition rate of 5.7 nm/min. The VO2 deposited on soda-lime glass exhibits excellent crystallinity and thermochromic properties (highest luminous transmission Tlum ≈ 30.4%, and solar modulation ΔTsol ≈ 12%) in comparison with similarly prepared VO2 on high temperature glass and quartz substrates. The high crystallinity rendered by short deposition duration and high ionization in HiPIMS process opens opportunities to apply high quality VO2 thin-film onto a variety of substrate more efficiently.

AFM images

Uv-vis-NIR spectrum

XRD spectrum

Raman spectrocopy spectrum

10.1016/j.ceramint.2019.12.042

Vu, T. D., Liu, S., Zeng, X., Li, C., & Long, Y. (2020). High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications. Ceramics International, 46(6), 8145–8153.

10356/138811

Vu, T. D., Liu, S., Zeng, X., Li, C., & Long, Y. (2020). High-power impulse magnetron sputtering deposition of high crystallinity vanadium dioxide for thermochromic smart windows applications. Ceramics International, 46(6), 8145–8153.

• Number of cases: 230

• No. of variables per record: 16

• Type of File: text/tab-separated-values

UNF:6:55mpYUyaaXzo7I3hUHx8Pg==

• λ(nm) - λ(nm)
• T(λ)(20°C) - T(λ)(20°C)
• T(λ)(90°C) - T(λ)(90°C)
• Contrast - Contrast
• V(λ) - V(λ)
• T(λ)*V(λ)(20°C) - T(λ)*V(λ)(20°C)
• T(λ)*V(λ)(90°C) - T(λ)*V(λ)(90°C)
• integrationV(λ) - integrationV(λ)
• integration[V(λ)*T(λ)](20°C) - integration[V(λ)*T(λ)](20°C)
• integration[V(λ)*T(λ)](90°C) - integration[V(λ)*T(λ)](90°C)
• A(λ) - A(λ)
• T(λ)*A(λ)(20°C) - T(λ)*A(λ)(20°C)
• T(λ)*A(λ)(90°C) - T(λ)*A(λ)(90°C)
• integrationA(λ) - integrationA(λ)
• integration[A(λ)*T(λ)](20°C) - integration[A(λ)*T(λ)](20°C)
• integration[A(λ)*T(λ)](90°C) - integration[A(λ)*T(λ)](90°C)

f21727 Location:

Summary Statistics: Min. 250.0; Valid 226.0; Max. 2500.0; Mean 1375.0; StDev 653.8475867254284

Variable Format: numeric

Notes: UNF:6:W1r/cvkVpZZOznARaBKcxg==

f21727 Location:

Summary Statistics: Min. 0.4080737829; StDev 16.10260652176621; Max. 63.50979233; Valid 226.0; Mean 46.68302025135973;

Variable Format: numeric

Notes: UNF:6:hv4Op/rcLSV7xcBNjVf5cw==

f21727 Location:

Summary Statistics: StDev 10.636425973562265; Max. 45.8110466; Mean 23.073493331014603; Valid 226.0; Min. 0.5035912991

Variable Format: numeric

Notes: UNF:6:NNNMUNI2W9sxj7XH4RQWWQ==

f21727 Location:

Summary Statistics: Valid 226.0; Min. -0.25862637159999996; Mean 23.609526920345136; Max. 47.55066967; StDev 16.79549090624894

Variable Format: numeric

Notes: UNF:6:jyJZ71Hz7XmfWi4PcpyuDA==

f21727 Location:

Summary Statistics: Max. 9950.0; StDev 3512.9282231807; Min. 0.0; Mean 2606.2682926829266; Valid 41.0;

Variable Format: numeric

Notes: UNF:6:h7CxMgsro64WgCxGZz/zKg==

f21727 Location:

Summary Statistics: Mean 115127.26491326267; Max. 461882.056242; Min. 0.0; Valid 41.0; StDev 161390.94002379078

Variable Format: numeric

Notes: UNF:6:NFciWUUOUBQt148M/JlZ5A==

f21727 Location:

Summary Statistics: Mean 104183.69851253487; Min. 0.0; StDev 147187.34314698624; Max. 422731.829052; Valid 41.0

Variable Format: numeric

Notes: UNF:6:nKs3O8n2gRp+jkyZToi9kw==

f21727 Location:

Summary Statistics: Max. 1068570.0; StDev 166364.32874639265; Mean 52125.36585365854; Valid 41.0; Min. 0.0

Variable Format: numeric

Notes: UNF:6:4fMWV50PngfEzJJIJV0sFQ==

f21727 Location:

Summary Statistics: Min. 0.0; Valid 41.0; Max. 4.720217861443769E7; StDev 7361967.413583307; Mean 2302545.298265253;

Variable Format: numeric

Notes: UNF:6:dkMC+R1DouAQPQmERrurKQ==

f21727 Location:

Summary Statistics: Min. 0.0; Max. 4.271531639013929E7; StDev 6664606.995328918; Mean 2083673.9702506973; Valid 41.0;

Variable Format: numeric

Notes: UNF:6:9qPVpqvZqzZPPoC/4wDYiQ==

f21727 Location:

Summary Statistics: Max. 1.6224; Valid 223.0; StDev 0.4970586658969048; Mean 0.44242371371409417; Min. 4.7309E-23

Variable Format: numeric

Notes: UNF:6:42n2gidC9jlCJVHfGIUYnQ==

f21727 Location:

Summary Statistics: Min. 1.93055625952161E-23; StDev 20.527805949101985; Valid 223.0; Mean 17.535757279103912; Max. 73.54197289258201;

Variable Format: numeric

Notes: UNF:6:cFTqKv2HgYwFwLkxDqssMw==

f21727 Location:

Summary Statistics: Valid 223.0; Max. 67.400833474386; Min. 3.08171375777889E-23; Mean 13.46272327566841; StDev 19.302350703737464

Variable Format: numeric

Notes: UNF:6:9KTPK8j0unc3nQBl1D35/A==

f21727 Location:

Summary Statistics: Valid 223.0; Max. 986.5695605824301; StDev 65.95199011285013; Min. 3.008400000000024E-8; Mean 8.848157494012824

Variable Format: numeric

Notes: UNF:6:oGzZTLN3xFQi61xr5kVV+A==

f21727 Location:

Variable Format: character

Notes: UNF:6:Nyjgnmq03EpzCA2QvlNeMg==

f21727 Location:

Summary Statistics: Min. 2.089169455921455E-8; Valid 230.0; Max. 30021.32791012084; Mean 261.966720410828; StDev 1979.9279320986343

Variable Format: numeric

Notes: UNF:6:BsitQHFKUpmCQ2girx8fBg==

Label:

120nm uv-vis.csv

text/csv

Label:

150nm uv-vis.csv

text/csv

Label:

180515_htglass.mtd

application/octet-stream

Label:

180515_htglass.uxd

application/octet-stream

Label:

180515_quartz.mtd

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Label:

180515_quartz.uxd

application/octet-stream

Label:

180515_sodalime.mtd

application/octet-stream

Label:

180515_sodalime.uxd

application/octet-stream

Label:

180nm uv-vis.csv

text/csv

Label:

2500s.mtd

application/octet-stream

Label:

2500s.uxd

application/octet-stream

Label:

3700s.mtd

application/octet-stream

Label:

3700s.uxd

application/octet-stream

Label:

40nm uv-vis.csv

text/csv

Label:

65nm uv-vis (1).TXT

text/plain

Label:

65nm uv-vis (2).TXT

text/plain

Label:

700s.mtd

application/octet-stream

Label:

700s.uxd

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b-c.xls

application/vnd.ms-excel

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c.000

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c.000

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c-d.xls

application/vnd.ms-excel

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d.000

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d.000

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Label:

e.000

application/octet-stream

Label:

e.jpeg

image/jpeg

Label:

H17092901SS_GI2D_65sccm.mtd

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Label:

H17092901SS_GI2D_65sccm.uxd

application/octet-stream

Label:

H17100201SS_GI2D_40sccm.mtd

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H17100201SS_GI2D_40sccm.uxd

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H17100202SS_GI2D_100sccm.mtd

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Label:

H17100202SS_GI2D_100sccm.uxd

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H17100501SS_GI2D_50sccm.mtd

application/octet-stream

Label:

H17100501SS_GI2D_50sccm.uxd

application/octet-stream

Label:

htglass.uxd

application/octet-stream

Label:

quarzt.uxd

application/octet-stream

Label:

sodalime_2D.uxd

application/octet-stream

Label:

Uv-vis 180515.csv

text/csv

Label:

XPS VO2.pptx

application/vnd.openxmlformats-officedocument.presentationml.presentation