Replication Data for: Reconfigurable MEMS Fano metasurfaces with multiple-input-output states for logic operations at terahertz frequencies (doi:10.21979/N9/XZATO7)

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Part 2: Study Description
Part 3: Data Files Description
Part 4: Variable Description
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Document Description

Citation

Title:

Replication Data for: Reconfigurable MEMS Fano metasurfaces with multiple-input-output states for logic operations at terahertz frequencies

Identification Number:

doi:10.21979/N9/XZATO7

Distributor:

DR-NTU (Data)

Date of Distribution:

2021-03-03

Version:

1

Bibliographic Citation:

Manjappa, Manukumara; Pitchappa, Prakash; Singh, Navab; Wang, Nan; Zheludev, Nikolay I.; Lee, Chengkuo; Singh, Ranjan, 2021, "Replication Data for: Reconfigurable MEMS Fano metasurfaces with multiple-input-output states for logic operations at terahertz frequencies", https://doi.org/10.21979/N9/XZATO7, DR-NTU (Data), V1, UNF:6:I6/Wbbi7GhGtLQPuFCjVsA== [fileUNF]

Study Description

Citation

Title:

Replication Data for: Reconfigurable MEMS Fano metasurfaces with multiple-input-output states for logic operations at terahertz frequencies

Identification Number:

doi:10.21979/N9/XZATO7

Authoring Entity:

Manjappa, Manukumara (Nanyang Technological University)

Pitchappa, Prakash (Nanyang Technological University)

Singh, Navab (Institute of Microelectronics, Singapore)

Wang, Nan (Institute of Microelectronics, Singapore)

Zheludev, Nikolay I. (University of Southampton and Nanyang Technological University)

Lee, Chengkuo (National University of Singapore)

Singh, Ranjan (Nanyang Technological University)

Software used in Production:

CST

Software used in Production:

Origin

Grant Number:

MOE2017-T2-1-110 (S)

Grant Number:

France-NRF2016-NRF-ANR004 (M4197003)

Grant Number:

France-NRF2016-NRF-ANR004 (M4197003)

Grant Number:

MOE2016-T3-1-006

Grant Number:

EP/M009122/1

Grant Number:

NRFCRP15-2015-02

Distributor:

DR-NTU (Data)

Access Authority:

Manjappa, Manukumara

Depositor:

Manjappa, Manukumara

Date of Deposit:

2019-02-19

Holdings Information:

https://doi.org/10.21979/N9/XZATO7

Study Scope

Keywords:

Engineering, Physics, Engineering, Physics, Logic gates, MEMS metamaterial, terahertz

Abstract:

A broad range of dynamic metasurfaces has been developed for manipulating the intensity, phase and wavefront of electromagnetic radiation from microwaves to optical frequencies. However, most of these metasurfaces operate in single-input-output state. Here, we experimentally demonstrate a reconfigurable MEMS Fano resonant metasurface possessing multiple-input-output (MIO) states that performs logic operations with two independently controlled electrical inputs and an optical read-out at terahertz frequencies. The far-field behaviour of Fano resonance exhibits XOR and XNOR operations, while the near-field resonant confinement enables the NAND operation. The MIO configuration resembling hysteresis type closed loop behaviour is realized through inducing electromechanically tuneable out-of-plane anisotropy in the near-field coupling of constituent resonator structures. The XOR metamaterial gate possesses potential applications in cryptographically secured terahertz wireless communication networks. Furthermore, the MIO features could lay the foundation for realization of programmable and randomly accessible metamaterials with enhanced electro-optical performance across terahertz, infrared and optical frequencies.

Kind of Data:

Research data

Methodology and Processing

Sources Statement

Data Access

Other Study Description Materials

Related Publications

Citation

Identification Number:

10.1038/s41467-018-06360-5

Bibliographic Citation:

Manjappa, M., Pitchappa, P., Singh, N., Wang, N., Zheludev, N. I., Lee, C., & Singh, R. (2018). Reconfigurable MEMS Fano metasurfaces with multiple-input–output states for logic operations at terahertz frequencies. Nature communications, 9, 4056.

Citation

Identification Number:

10356/81574

Bibliographic Citation:

Manjappa, M., Pitchappa, P., Singh, N., Wang, N., Zheludev, N. I., Lee, C., & Singh, R. (2018). Reconfigurable MEMS Fano metasurfaces with multiple-input–output states for logic operations at terahertz frequencies. Nature communications, 9, 4056.

File Description--f7804

File: Fig_2_a_Increasing_asymmetry.tab

  • Number of cases: 356

  • No. of variables per record: 10

  • Type of File: text/tab-separated-values

Notes:

UNF:6:YFSWDOfSgY1ttAF5ZqjCAg==

File Description--f7780

File: Fig_2_b_Decreasing_asymmetry.tab

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  • No. of variables per record: 11

  • Type of File: text/tab-separated-values

Notes:

UNF:6:9TiwH15KJ8vN+BsngpIWxg==

File Description--f7776

File: Fig_2_c_Increasing_asymmetry_Simul.tab

  • Number of cases: 1003

  • No. of variables per record: 6

  • Type of File: text/tab-separated-values

Notes:

UNF:6:NAVe9B7EyitSeXlncNJsUA==

File Description--f7788

File: Fig_2_d_Decreasing_asymmetry-Simul.tab

  • Number of cases: 1003

  • No. of variables per record: 6

  • Type of File: text/tab-separated-values

Notes:

UNF:6:UUie/G3+7tvJa0wgiLFHew==

File Description--f7787

File: Fig_3_a_MIO_Intensity_Expt.tab

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  • No. of variables per record: 4

  • Type of File: text/tab-separated-values

Notes:

UNF:6:H559m/oSGRLkUoXy9WoCBw==

File Description--f7795

File: Fig_3_b_MIO_Intensity_Simul.tab

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  • No. of variables per record: 4

  • Type of File: text/tab-separated-values

Notes:

UNF:6:hkaE63tjbb7llxhZe7fbnA==

File Description--f7792

File: Fig_3_c_MIO_Qfactors_Expt.tab

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  • No. of variables per record: 4

  • Type of File: text/tab-separated-values

Notes:

UNF:6:W83bVgAsZ7fshVXzl7zIFg==

File Description--f7803

File: Fig_3_d_MIO_Qfactors_Simul.tab

  • Number of cases: 16

  • No. of variables per record: 4

  • Type of File: text/tab-separated-values

Notes:

UNF:6:ByWzNx8FEIF3NLKe8jRwpw==

File Description--f7790

File: Fig_4_a_b_c_d_XOR_Operation.tab

  • Number of cases: 56

  • No. of variables per record: 5

  • Type of File: text/tab-separated-values

Notes:

UNF:6:6p9PdnX+xuWyTyzS7jNFKQ==

File Description--f7793

File: Fig_5_e_MIO_E-field_Simulations.tab

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  • No. of variables per record: 4

  • Type of File: text/tab-separated-values

Notes:

UNF:6:0OTiYTSPy9TIte2TmkxlVg==

File Description--f7786

File: Figure_10.tab

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Notes:

UNF:6:f6zb8Nv3OeTdZPHSRrF/pQ==

File Description--f7783

File: Figure_11.tab

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Notes:

UNF:6:uOGMYXeHx3I9HHKZU/9KVw==

File Description--f7784

File: Figure_12.tab

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  • Type of File: text/tab-separated-values

Notes:

UNF:6:/J3PS8vqiA702Znb9z3oQA==

File Description--f7777

File: Figure_13.tab

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  • Type of File: text/tab-separated-values

Notes:

UNF:6:o42RBJV+DJz21XchTSSQKQ==

File Description--f7773

File: Figure_14.tab

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  • No. of variables per record: 12

  • Type of File: text/tab-separated-values

Notes:

UNF:6:0150iNtmBKJOM/pW1itwnQ==

File Description--f7772

File: Figure_15_a.tab

  • Number of cases: 11

  • No. of variables per record: 2

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Notes:

UNF:6:oduhahfwFv4Xc2PxjYmrtw==

File Description--f7791

File: Figure_15_b.tab

  • Number of cases: 12

  • No. of variables per record: 2

  • Type of File: text/tab-separated-values

Notes:

UNF:6:rb3KgUP/nctfbTbE55/MRQ==

File Description--f7782

File: Figure_15_c.tab

  • Number of cases: 15

  • No. of variables per record: 2

  • Type of File: text/tab-separated-values

Notes:

UNF:6:gh9k/zG/8HeZ+/pswoLqEw==

File Description--f7801

File: Figure_15_d.tab

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  • No. of variables per record: 2

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Notes:

UNF:6:o0XAcen6Jf1lq5Tchs9n+w==

File Description--f7789

File: Figure_16.tab

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  • No. of variables per record: 5

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Notes:

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File Description--f7800

File: Figure_17.tab

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  • No. of variables per record: 5

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Notes:

UNF:6:Gy2yNzI6ARrz/kYont28Xg==

File Description--f7785

File: Figure_2.tab

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  • No. of variables per record: 2

  • Type of File: text/tab-separated-values

Notes:

UNF:6:4pr9UD2p+WIk65UPvJ2ZSQ==

File Description--f7778

File: Figure_3.tab

  • Number of cases: 75

  • No. of variables per record: 8

  • Type of File: text/tab-separated-values

Notes:

UNF:6:bkClgc1l45mFtfZc9kpG0w==

File Description--f7797

File: Figure_4_a.tab

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  • No. of variables per record: 4

  • Type of File: text/tab-separated-values

Notes:

UNF:6:qTWGhI3CMOanzckfbyGBDA==

File Description--f7796

File: Figure_4_b.tab

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  • No. of variables per record: 4

  • Type of File: text/tab-separated-values

Notes:

UNF:6:mHAQnR42VVavBAvOYUQPBg==

File Description--f7779

File: Figure_4_c.tab

  • Number of cases: 360

  • No. of variables per record: 4

  • Type of File: text/tab-separated-values

Notes:

UNF:6:40A374Uj9JDPPswNoIa53g==

File Description--f7802

File: Figure_4_d.tab

  • Number of cases: 358

  • No. of variables per record: 4

  • Type of File: text/tab-separated-values

Notes:

UNF:6:bLAi8EYbLI841HDkRFWJWw==

File Description--f7781

File: Figure_5.tab

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  • No. of variables per record: 3

  • Type of File: text/tab-separated-values

Notes:

UNF:6:VySeSiYTKQ94CzI2VVNNiA==

File Description--f7794

File: Figure_6.tab

  • Number of cases: 1001

  • No. of variables per record: 2

  • Type of File: text/tab-separated-values

Notes:

UNF:6:C/e5MP3bFUY8/ElqQEJCjw==

File Description--f7775

File: Figure_7.tab

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  • No. of variables per record: 3

  • Type of File: text/tab-separated-values

Notes:

UNF:6:JQprArRTfGYTTa3QhWk4tw==

File Description--f7799

File: Figure_8.tab

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  • No. of variables per record: 10

  • Type of File: text/tab-separated-values

Notes:

UNF:6:6BZfXyxGZmz6nI87qHKU8g==

File Description--f7798

File: Figure_9.tab

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  • No. of variables per record: 11

  • Type of File: text/tab-separated-values

Notes:

UNF:6:Nn1QJ7MjU4s7i20kXEYIFw==

File Description--f7774

File: Inset_Fig_2_b_Mechanical_deformation_Cantilevers.tab

  • Number of cases: 73

  • No. of variables per record: 11

  • Type of File: text/tab-separated-values

Notes:

UNF:6:vH15EYRsC70TPr3mUlljpQ==

Variable Description

List of Variables:

Variables

Frequency(THz)

f7804 Location:

Summary Statistics: Max. 1.50010724669174; StDev 0.376536374221871; Mean 0.8506705728190985; Valid 356.0; Min. 0.201233898946453

Variable Format: numeric

Notes: UNF:6:Irq7Xpk22/Xh2VauLeGyVQ==

V1=0V,V2=0V

f7804 Location:

Summary Statistics: Max. 0.846458720919117; StDev 0.1786357320658944; Mean 0.501201520277083; Valid 356.0; Min. 0.0652214511333508

Variable Format: numeric

Notes: UNF:6:OTyjrXuePZw2tHbIZbh4qQ==

V1=10V,V2=0V

f7804 Location:

Summary Statistics: Mean 0.49833177304866694; Max. 0.840429603531817; StDev 0.178376554148819; Valid 356.0; Min. 0.0655145061077935

Variable Format: numeric

Notes: UNF:6:m3nLO8B+hVtfK8pLFPNj7A==

V1=15V,V2=0V

f7804 Location:

Summary Statistics: Valid 356.0; Mean 0.49731004805511114; Max. 0.832572800841675; StDev 0.17641128650983992; Min. 0.0652368367066352;

Variable Format: numeric

Notes: UNF:6:C3qD4b9X8PxUPqXbAmYTMA==

V1=20V,V2=0V

f7804 Location:

Summary Statistics: Min. 0.0596106809955224; Valid 356.0; StDev 0.16766442550028574; Mean 0.49003527749572134; Max. 0.790334861900466

Variable Format: numeric

Notes: UNF:6:5/WpqUP1hiKz73hdZ1qQ1Q==

V1=21V,V2=0V

f7804 Location:

Summary Statistics: Mean 0.49338360995749886; StDev 0.16271931787169838; Valid 356.0; Min. 0.0604068499060668; Max. 0.819685452568602

Variable Format: numeric

Notes: UNF:6:Lmt+jekqBGjo/i8DADucxg==

V1=23V,V2=0V

f7804 Location:

Summary Statistics: Valid 356.0; Min. 0.0589285625235558; StDev 0.1618389937732806; Max. 0.843435607112829; Mean 0.49255946086355823

Variable Format: numeric

Notes: UNF:6:47SMOGwKxx+dcgaKiTE3Jw==

V1=25V,V2=0V

f7804 Location:

Summary Statistics: Mean 0.48504600249595325; Valid 356.0; StDev 0.15844131988568463; Min. 0.0546957003529757; Max. 0.792519597682015

Variable Format: numeric

Notes: UNF:6:Mn6MEu0af6i8okGSMRObJQ==

V1=30V,V2=0V

f7804 Location:

Summary Statistics: Max. 0.81789704038827; Valid 356.0; Mean 0.4891002858932649; StDev 0.16039869498875803; Min. 0.0533487358553175

Variable Format: numeric

Notes: UNF:6:Z9IJFFB/ZP8unrWV+5p0GA==

V1=35V,V2=0V

f7804 Location:

Summary Statistics: StDev 0.16040264988482492; Mean 0.48386966746728516; Max. 0.820397442269205; Min. 0.0515142910161017; Valid 356.0

Variable Format: numeric

Notes: UNF:6:td+OW0ldw6vrUz6VnBzu2g==

Frequency(THz)

f7780 Location:

Summary Statistics: StDev 0.376536374221871; Min. 0.201233898946453; Mean 0.8506705728190985; Max. 1.50010724669174; Valid 356.0;

Variable Format: numeric

Notes: UNF:6:Irq7Xpk22/Xh2VauLeGyVQ==

V2=0V,V1=35V

f7780 Location:

Summary Statistics: Min. 0.0515142910161017; Mean 0.48386966746728516; StDev 0.16040264988482492; Valid 356.0; Max. 0.820397442269205;

Variable Format: numeric

Notes: UNF:6:td+OW0ldw6vrUz6VnBzu2g==

V2=5V,V1=35V

f7780 Location:

Summary Statistics: Mean 0.48565475160746563; Min. 0.0517290534204084; Valid 356.0; StDev 0.16045557337394262; Max. 0.832027619331787

Variable Format: numeric

Notes: UNF:6:QL9q4dZTnihWGvKgAPjJtQ==

V2=10V,V1=35V

f7780 Location:

Summary Statistics: Max. 0.824843522700935; Min. 0.0546821157417767; Mean 0.48876706730485153; Valid 356.0; StDev 0.1603591958292644;

Variable Format: numeric

Notes: UNF:6:ppF4MEbnEh4dVlLe4PhFww==

V2=15V,V1=35V

f7780 Location:

Summary Statistics: Min. 0.0537305509867096; Max. 0.831459759024395; Mean 0.48629887487492085; Valid 356.0; StDev 0.1606190571249932;

Variable Format: numeric

Notes: UNF:6:tC3cIY7wfqxRqIcF6DC4pQ==

V2=20V,V1=35V

f7780 Location:

Summary Statistics: Valid 356.0; Mean 0.4887269117366863; StDev 0.1589012061865481; Min. 0.0465039054768061; Max. 0.837352521118292;

Variable Format: numeric

Notes: UNF:6:eo/N+2UI+CYbt//28WhhaQ==

V2=23V,V1=35V

f7780 Location:

Summary Statistics: StDev 0.16388015850939114; Mean 0.49170239937411836; Valid 356.0; Max. 0.83494419865199; Min. 0.0437008888518373;

Variable Format: numeric

Notes: UNF:6:bqwWXCun2993eVhRCFjucw==

V2=25V,V1=35V

f7780 Location:

Summary Statistics: Min. 0.0521695597028698; Valid 356.0; StDev 0.16482816204104891; Mean 0.4959461901319275; Max. 0.835856737456588

Variable Format: numeric

Notes: UNF:6:Mr0cIZdFBGpjxrOseuY17g==

V2=27V,V1=35V

f7780 Location:

Summary Statistics: StDev 0.16458169612551193; Mean 0.4946673821405168; Min. 0.0403912510660275; Max. 0.817997548700148; Valid 356.0

Variable Format: numeric

Notes: UNF:6:EB2OzOLZpQH48N6oqR25lA==

V2=30V,V1=35V

f7780 Location:

Summary Statistics: Mean 0.4988803551622758; Valid 356.0; Min. 0.0273826369596906; Max. 0.81391095833209; StDev 0.16976095833714666;

Variable Format: numeric

Notes: UNF:6:X6sq0ZMYak5uVY762tWv6Q==

V2=35V,V1=35V

f7780 Location:

Summary Statistics: Valid 356.0; Mean 0.505916509966872; Min. 0.0191531210230648; Max. 0.832968605947376; StDev 0.17369770047820077

Variable Format: numeric

Notes: UNF:6:YENexb5r9eIgkxD8zTD5FA==

Frequency

f7776 Location:

Variable Format: character

Notes: UNF:6:BiHuQjq9XA6GOzoc8Vx9bw==

TransmissionAmplitude

f7776 Location:

Variable Format: character

Notes: UNF:6:NZ0fXCPVZRHpN5GX/628rw==

TransmissionAmplitude

f7776 Location:

Variable Format: character

Notes: UNF:6:SnMRpVQMims3KBifCxkWAw==

TransmissionAmplitude

f7776 Location:

Variable Format: character

Notes: UNF:6:JpCYFgpcpFREJ9NnPxbH5A==

TransmissionAmplitude

f7776 Location:

Variable Format: character

Notes: UNF:6:MNtQeB54a3xEagyZQX0H+g==

TransmissionAmplitude

f7776 Location:

Variable Format: character

Notes: UNF:6:Ah5hweo2gMyvg2H6t/7Vyg==

Frequency

f7788 Location:

Variable Format: character

Notes: UNF:6:E0USMn8szRVw9Iyo+YY4pg==

TransmissionAmplitude

f7788 Location:

Variable Format: character

Notes: UNF:6:kcSqCYxpUvyaGsvEvp184A==

TransmissionAmplitude

f7788 Location:

Variable Format: character

Notes: UNF:6:Nv02VNCD5ruvAWiNq5uU4Q==

TransmissionAmplitude

f7788 Location:

Variable Format: character

Notes: UNF:6:MKayxMZYL8xkrVJuSIHBXw==

TransmissionAmplitude

f7788 Location:

Variable Format: character

Notes: UNF:6:EoTcPPBVOmBha8SrnYiR5g==

TransmissionAmplitude

f7788 Location:

Variable Format: character

Notes: UNF:6:ggrSloqOOYAayGdxatRMQQ==

DifferentialVolatge(DV=|V1-V2|)

f7787 Location:

Variable Format: character

Notes: UNF:6:RIFIuLiX3Kf+Mk8MyWrbaA==

PeaktopeakFanointensity

f7787 Location:

Variable Format: character

Notes: UNF:6:6O9tvJWH0IcJSbRuGCKeNQ==

DifferentialVolatge(DV=|V1-V2|)

f7787 Location:

Variable Format: character

Notes: UNF:6:W31qRJMutYNervUDn3qC3w==

PeaktopeakFanointensity

f7787 Location:

Variable Format: character

Notes: UNF:6:jAYMRQBi+pKbJI3sc2HwZw==

DecreasingAsymmtery

f7795 Location:

Variable Format: character

Notes: UNF:6:tRDqQ4MQU24MRG1vIdNGIg==

PeaktopeakFanoIntensity

f7795 Location:

Variable Format: character

Notes: UNF:6:ZOHRydUrwVwD63YnG8ecvQ==

IncreasingAsymmtery

f7795 Location:

Variable Format: character

Notes: UNF:6:HRQTRIiVqXe3EN5oATd/YA==

PeaktopeakFanoIntensity

f7795 Location:

Variable Format: character

Notes: UNF:6:MaC84dYLYPXywwO9SGBSpA==

DifferentialVoltage(DV=V1-V2)

f7792 Location:

Variable Format: character

Notes: UNF:6:bsnNm6sO/KwbIwM1EhtifQ==

Q-factors

f7792 Location:

Variable Format: character

Notes: UNF:6:DkY0TcxNJzVxPNCZjfdTlA==

DifferentialVoltage(DV=V1-V2)

f7792 Location:

Variable Format: character

Notes: UNF:6:eBVFBG/RObuMW92LIcEzzg==

Q-factors

f7792 Location:

Variable Format: character

Notes: UNF:6:Z0KvEI2UtTG9azIWyPvUAw==

DecreasingAsymmetry

f7803 Location:

Variable Format: character

Notes: UNF:6:tRDqQ4MQU24MRG1vIdNGIg==

Q-factors

f7803 Location:

Variable Format: character

Notes: UNF:6:G3/2r+FRA7gSG0xPcu0JjQ==

IncreasingAsymmetry

f7803 Location:

Variable Format: character

Notes: UNF:6:HRQTRIiVqXe3EN5oATd/YA==

Q-factors

f7803 Location:

Variable Format: character

Notes: UNF:6:6kqXIO0Rvvutm51jDlCbEQ==

Frequency(THz)

f7790 Location:

Summary Statistics: Valid 56.0; Max. 0.651266072953977; StDev 0.059673192161118944; Min. 0.450032174007523; Mean 0.5506491234807499;

Variable Format: numeric

Notes: UNF:6:BSSyXqf5SrfNe8dvt4Ps/Q==

V1=0V,V2=0V

f7790 Location:

Summary Statistics: Max. 0.846458720919117; Min. 0.644628594572498; Mean 0.7699874095402516; Valid 56.0; StDev 0.06403416911832753

Variable Format: numeric

Notes: UNF:6:NR8uN2VLzICsRDKADjpUBQ==

V1=35V,V2=0V

f7790 Location:

Summary Statistics: Mean 0.63708892131824; Valid 56.0; StDev 0.14528650804895768; Min. 0.320645699429263; Max. 0.820397442269205

Variable Format: numeric

Notes: UNF:6:ayl5aZNdkbup26rZ6t3L2Q==

V1=0V,V2=35V

f7790 Location:

Summary Statistics: StDev 0.14495075292954113; Valid 56.0; Mean 0.6388988838751983; Max. 0.823471954469439; Min. 0.323917746158221

Variable Format: numeric

Notes: UNF:6:bfkrBAMJmuJ+Fhy+D+v2jA==

V1=35V,V2=35V

f7790 Location:

Summary Statistics: Min. 0.112865670912562; Max. 0.832968605947376; StDev 0.23913904714238815; Valid 56.0; Mean 0.5976520264559597;

Variable Format: numeric

Notes: UNF:6:ufQz5s2A0tTAKR26+s90dw==

Decreasingasymmetry

f7793 Location:

Variable Format: character

Notes: UNF:6:jSPN2TyvE+5SpIiO4Qd1+Q==

E-fieldamplitude

f7793 Location:

Variable Format: character

Notes: UNF:6:TiDhen9e102o5Qg2bXJGIw==

IncreasingAsymmetry

f7793 Location:

Variable Format: character

Notes: UNF:6:l8Bv9oDgbqSkDyCm4VZT3Q==

E-fieldamplitude

f7793 Location:

Variable Format: character

Notes: UNF:6:F6ftJnaMzLHJAIG2G7Tl6A==

Asymmetry

f7786 Location:

Variable Format: character

Notes: UNF:6:aBnarP7BtVOo/baorXY5sg==

FoM

f7786 Location:

Variable Format: character

Notes: UNF:6:u3oUrWHT+qZ8A9UrR00D2A==

Asymmetry

f7786 Location:

Variable Format: character

Notes: UNF:6:jnWDyQICM3qb6lQiHIevXg==

FoM

f7786 Location:

Variable Format: character

Notes: UNF:6:1cc6zFmmAyvjxGAl1+xJuA==

DV(Volts)

f7783 Location:

Summary Statistics: StDev 10.517181709522331; Max. 35.0; Mean 19.88888888888889; Valid 9.0; Min. 0.0;

Variable Format: numeric

Notes: UNF:6:Yp0nP20TWJovfGKtFWlEDg==

FoM

f7783 Location:

Summary Statistics: Min. 0.0; Mean 1.6752411111111112; StDev 2.121684328325284; Max. 5.01028; Valid 9.0;

Variable Format: numeric

Notes: UNF:6:JTjj9oMBy3Vien0+/ublVA==

DV(Volts)

f7783 Location:

Summary Statistics: StDev 11.294049564064943; Mean 16.0; Min. 0.0; Valid 10.0; Max. 35.0;

Variable Format: numeric

Notes: UNF:6:2Q5Wq3x4ZzB6awZ3pEgh+A==

FoM

f7783 Location:

Summary Statistics: Min. 0.0; Valid 10.0; Max. 5.13771; Mean 2.540984; StDev 2.348406139993677;

Variable Format: numeric

Notes: UNF:6:5FTe0xuG/BLodcMpRra/SA==

Asymmetry

f7784 Location:

Variable Format: character

Notes: UNF:6:dX+lfdyeghaG3XL0JXVeSw==

DT

f7784 Location:

Variable Format: character

Notes: UNF:6:BlWjfoWW1KlNIyxj01x5Pw==

Asymmetry

f7784 Location:

Variable Format: character

Notes: UNF:6:J2pRr+2x3+sIDAeMNJ/2zA==

DT

f7784 Location:

Variable Format: character

Notes: UNF:6:Y1purkEcmqW8MVcFoj4New==

Asymmetry

f7784 Location:

Variable Format: character

Notes: UNF:6:5YxUomXLbFuB+l18GRHMWw==

DT

f7784 Location:

Variable Format: character

Notes: UNF:6:+nOH1Y54/qgN+K//EikbIA==

Asymmetry

f7784 Location:

Variable Format: character

Notes: UNF:6:P3ei3gWB42rzqZ+sBv1U8g==

DT

f7784 Location:

Variable Format: character

Notes: UNF:6:/tBXoyh3f25oGEgyiPvsug==

Asymmetry

f7784 Location:

Variable Format: character

Notes: UNF:6:8LBCvqHdcxFqkCSQCQO8MQ==

DT

f7784 Location:

Variable Format: character

Notes: UNF:6:3+GdTQz/310621py4OOSKA==

Asymmetry

f7784 Location:

Variable Format: character

Notes: UNF:6:U0tt4nnsTJTrK2pnqF991w==

DT

f7784 Location:

Variable Format: character

Notes: UNF:6:BdRmWMPzYK8D/42bcAaj4Q==

Asymmetry

f7777 Location:

Variable Format: character

Notes: UNF:6:dX+lfdyeghaG3XL0JXVeSw==

Q-factor

f7777 Location:

Variable Format: character

Notes: UNF:6:z9cEu7ztwxS+gpcH2lhudQ==

Asymmetry

f7777 Location:

Variable Format: character

Notes: UNF:6:6QumyMi6cAN02NzpUPC9uw==

Q-factor

f7777 Location:

Variable Format: character

Notes: UNF:6:9jE6R62PtOuOjbMK/ZKAdw==

Asymmetry

f7777 Location:

Variable Format: character

Notes: UNF:6:Ex0Dv7R9ZwbNDx9qom20vA==

Q-factors

f7777 Location:

Variable Format: character

Notes: UNF:6:/Sc3Ixt2MGvEMrw+2atpCA==

Asymmetry

f7777 Location:

Variable Format: character

Notes: UNF:6:EHagdZbjDWRdWEFElHxVwQ==

Q-factors

f7777 Location:

Variable Format: character

Notes: UNF:6:3WaRVGvb2UD7quMqjOJFbQ==

Asymmetry

f7777 Location:

Variable Format: character

Notes: UNF:6:qmz2fodENLpEcOn51Hs4UQ==

Q-factors

f7777 Location:

Variable Format: character

Notes: UNF:6:6tpoAKkJ8/7kXA7FbBiJgw==

Asymmetry

f7777 Location:

Variable Format: character

Notes: UNF:6:/Iq8qMq7lp4J3IgKSv22KQ==

Q-factors

f7777 Location:

Variable Format: character

Notes: UNF:6:Mc8MvnLAd/8q7hRuiGjgXw==

Asymmetry

f7773 Location:

Variable Format: character

Notes: UNF:6:dX+lfdyeghaG3XL0JXVeSw==

FoM

f7773 Location:

Variable Format: character

Notes: UNF:6:4+e9j14nzXukEAKfB7RXDg==

Asymmetry

f7773 Location:

Variable Format: character

Notes: UNF:6:J2pRr+2x3+sIDAeMNJ/2zA==

FoM

f7773 Location:

Variable Format: character

Notes: UNF:6:5ydzI732nuvLreNsPbqiGw==

Asymmetry

f7773 Location:

Variable Format: character

Notes: UNF:6:Ex0Dv7R9ZwbNDx9qom20vA==

FoM

f7773 Location:

Variable Format: character

Notes: UNF:6:zqlrzGqf0U5fJ78AhhSzwA==

Asymmetry

f7773 Location:

Variable Format: character

Notes: UNF:6:EHagdZbjDWRdWEFElHxVwQ==

FoM

f7773 Location:

Variable Format: character

Notes: UNF:6:eo51V4H7Ex29JH9pp+86Hg==

Asymmetry

f7773 Location:

Variable Format: character

Notes: UNF:6:qmz2fodENLpEcOn51Hs4UQ==

FoM

f7773 Location:

Variable Format: character

Notes: UNF:6:QhjTm6L2BSmyQFKd6QrdBw==

Asymmetry

f7773 Location:

Variable Format: character

Notes: UNF:6:/Iq8qMq7lp4J3IgKSv22KQ==

FoM

f7773 Location:

Variable Format: character

Notes: UNF:6:tRzGxSfU7EmKpcmf40tIyg==

Voltage

f7772 Location:

Variable Format: character

Notes: UNF:6:cWaq8Y0kwq2k2X5/BlqUkQ==

|DT|

f7772 Location:

Summary Statistics: Valid 9.0; Mean 0.1366888888888889; Min. 0.0; StDev 0.1788966562323374; Max. 0.4246

Variable Format: numeric

Notes: UNF:6:FtCgOZ66FU3tiWKevHk/sg==

Voltage

f7791 Location:

Variable Format: character

Notes: UNF:6:Av3zmQsPdXtsaC74w2Bu8g==

|DT|

f7791 Location:

Summary Statistics: Max. 0.4246; Mean 0.20204; Valid 10.0; StDev 0.1979052590396616; Min. 0.0

Variable Format: numeric

Notes: UNF:6:9zzOofBIpS3KWNhsr6Nb5Q==

IncreasingAsymmetry

f7782 Location:

Variable Format: character

Notes: UNF:6:qCE7kfcs0dFfHOPEFJEJNA==

PeaktopeakFanointensity

f7782 Location:

Variable Format: character

Notes: UNF:6:bVAIIVoxMoZM9LPrc5i5Lg==

DecreasingAsymmetry

f7801 Location:

Variable Format: character

Notes: UNF:6:tRDqQ4MQU24MRG1vIdNGIg==

PeaktopeakFanoIntensity

f7801 Location:

Variable Format: character

Notes: UNF:6:ZOHRydUrwVwD63YnG8ecvQ==

Frequency(THz)

f7789 Location:

Summary Statistics: Valid 1002.0; Max. 1.2; Min. 0.2; StDev 0.2890409018877291; Mean 0.7002110778443115

Variable Format: numeric

Notes: UNF:6:6W9AiD6jPbcfwmgsjzyO+Q==

Transmissionamplitude

f7789 Location:

Variable Format: character

Notes: UNF:6:CRUqAcTxZdjsCoLpXyscgw==

Transmissionamplitude

f7789 Location:

Variable Format: character

Notes: UNF:6:zr43fNnekHcuXY0ieNgLHw==

Transmissionamplitude

f7789 Location:

Variable Format: character

Notes: UNF:6:b/agQOAtNQ+ZeTO1/QMQsQ==

Transmissionamplitude

f7789 Location:

Variable Format: character

Notes: UNF:6:Lu6OLOfHHpCyB6vpzd9cwA==

Frequency(THz)

f7800 Location:

Variable Format: character

Notes: UNF:6:uKIP0xTk4YW0L+pvfztnDw==

TransmissionAmplitude

f7800 Location:

Variable Format: character

Notes: UNF:6:SY7XFZj2eRLJA0Ez6Bk3MA==

TransmissionAmplitude

f7800 Location:

Variable Format: character

Notes: UNF:6:Qh7lnjygQluJDFNs2QU/LA==

TransmissionAmplitude

f7800 Location:

Variable Format: character

Notes: UNF:6:Nzpwjh3hzLEjkbkofL+BvQ==

TransmissionAmplitude

f7800 Location:

Variable Format: character

Notes: UNF:6:WymxujzNo8N0az99Xg7O2g==

AppliedVoltage(Volts)

f7785 Location:

Summary Statistics: Mean 17.571428571428573; Valid 7.0; Max. 30.0; Min. 0.0; StDev 10.146545271784923

Variable Format: numeric

Notes: UNF:6:V0JxlWZ+13lHF/rlNc1jCQ==

Releaseheight(nm)

f7785 Location:

Summary Statistics: Min. 0.0; StDev 203.08408329124052; Max. 578.58768; Valid 7.0; Mean 401.8877785714286;

Variable Format: numeric

Notes: UNF:6:0pb8mkgKCI8q5QkVfaFqMw==

LengthofCantilever

f7778 Location:

Variable Format: character

Notes: UNF:6:lIjHOVeh9H50cxYkh6rqrg==

Actuationheight

f7778 Location:

Variable Format: character

Notes: UNF:6:pTvX13V+SPwCaYeQOUUOgw==

LengthofCantilever

f7778 Location:

Variable Format: character

Notes: UNF:6:1A/PdDADKxZmRE6OFqXaCQ==

Actuationheight

f7778 Location:

Variable Format: character

Notes: UNF:6:8GMxWFihCZMLgvzAs/5O/A==

LengthofCantilever

f7778 Location:

Variable Format: character

Notes: UNF:6:rKADcBuxUSLr31dbhZMHVg==

Actuationheight

f7778 Location:

Variable Format: character

Notes: UNF:6:JEDhc6GN08EaPhGaPB2aEg==

LengthofCantilever

f7778 Location:

Variable Format: character

Notes: UNF:6:ucL5gOYXCTtglcdyJlYFxQ==

Actuationheight

f7778 Location:

Variable Format: character

Notes: UNF:6:52BLULsNphXIeO9QBXC3PQ==

Frequency

f7797 Location:

Variable Format: character

Notes: UNF:6:QDsxaCdpXNiae9WGOY/MoA==

TransmissionAmplitude

f7797 Location:

Variable Format: character

Notes: UNF:6:rqxXfKbdsn0QT5U+7StXIw==

TransmissionAmplitude

f7797 Location:

Variable Format: character

Notes: UNF:6:Fux50GXEufaCL0Hedw6bQQ==

TransmissionAmplitude

f7797 Location:

Variable Format: character

Notes: UNF:6:hHsG2h5SP+WNyJ7XE5XjbQ==

Frequency

f7796 Location:

Variable Format: character

Notes: UNF:6:GVI3w3gV8u4DCPCc4buv3Q==

TransmissionAmplitude

f7796 Location:

Variable Format: character

Notes: UNF:6:HXr61KwxByZ09hssbjzGCw==

TransmissionAmplitude

f7796 Location:

Variable Format: character

Notes: UNF:6:ZAjwZx04CT69vTzwPl92LQ==

TransmissionAmplitude

f7796 Location:

Variable Format: character

Notes: UNF:6:l7pKqECjH6qhKZ797XQ7oQ==

Frequency

f7779 Location:

Variable Format: character

Notes: UNF:6:IXV6mousC63k7LTNsfe/nA==

TransmissionAmplitude

f7779 Location:

Variable Format: character

Notes: UNF:6:yzdBzrKZ1ndD9DZ1w6JNgQ==

TransmissionAmplitude

f7779 Location:

Variable Format: character

Notes: UNF:6:O7Qu14Coer91zG0e3PpGrw==

TransmissionAmplitude

f7779 Location:

Variable Format: character

Notes: UNF:6:piBIRlnlQrUk+EaQaIIctw==

Frequency

f7802 Location:

Variable Format: character

Notes: UNF:6:X0sDp1f/FbjtMkhK2PI0MA==

TransmissionAmplitude

f7802 Location:

Variable Format: character

Notes: UNF:6:I8usYmtRkHc/H7JlO/U6kw==

TransmissionAmplitude

f7802 Location:

Variable Format: character

Notes: UNF:6:E7phNcuIejgTQtMYH5zSYA==

TransmissionAmplitude

f7802 Location:

Variable Format: character

Notes: UNF:6:b/VIxv1msIa0eyRUPJIPrQ==

ThicknessofAl

f7781 Location:

Variable Format: character

Notes: UNF:6:1c1TfFUTrkNkK6WY3ZtbvA==

Releasedheight

f7781 Location:

Variable Format: character

Notes: UNF:6:hPdKA1hQkop8xSydtij61Q==

Asymmetryparameter

f7781 Location:

Variable Format: character

Notes: UNF:6:epkmP2ajZMzkbIRBMxFvtA==

Frequency(THz)

f7794 Location:

Summary Statistics: Max. 1.2; StDev 0.2891081112663565; Mean 0.7000000000000001; Valid 1001.0; Min. 0.2

Variable Format: numeric

Notes: UNF:6:SQ1usqQPt9vxP77ZUBP0sw==

TransmissionIntensity

f7794 Location:

Summary Statistics: StDev 0.22112471837666414; Mean 0.3131199317462537; Min. 8.59953E-4; Max. 0.86903; Valid 1001.0;

Variable Format: numeric

Notes: UNF:6:9ptPW5ZXFITOtYy3BciSbw==

Frequency

f7775 Location:

Variable Format: character

Notes: UNF:6:XKS/SNY5fJwhnF7FcFwtFw==

Transmittance

f7775 Location:

Variable Format: character

Notes: UNF:6:cyniYS68TqdrZwltIGTR9w==

Transmittance

f7775 Location:

Variable Format: character

Notes: UNF:6:8VgTaIDOfAJhG1Cfg+56YA==

Frequency

f7799 Location:

Variable Format: character

Notes: UNF:6:kPjnyU5OlP+nl6Wd458AXQ==

Intensity

f7799 Location:

Variable Format: character

Notes: UNF:6:WyLyAjEcikYy0aO1VGm0CQ==

Intensity

f7799 Location:

Variable Format: character

Notes: UNF:6:JhU2TOgSQhyQYpRzzMTEzA==

Intensity

f7799 Location:

Variable Format: character

Notes: UNF:6:puzg32Oxs79Q0PnL3UPnOA==

Intensity

f7799 Location:

Variable Format: character

Notes: UNF:6:PCK0M9zdzIvxMcEkCeGrEQ==

Intensity

f7799 Location:

Variable Format: character

Notes: UNF:6:kG3fAhN8n6+1+hzP/fnX5A==

Intensity

f7799 Location:

Variable Format: character

Notes: UNF:6:rvMwo8EQv4gmKky8uhT2mg==

Intensity

f7799 Location:

Variable Format: character

Notes: UNF:6:F2gEaI1Oc1O/LxKpcHTxRw==

Intensity

f7799 Location:

Variable Format: character

Notes: UNF:6:1BDiqS2PmxVnvL4LE73jIQ==

Intensity

f7799 Location:

Variable Format: character

Notes: UNF:6:PDOUcvQRAm4YmeVweFFQAw==

Frequency

f7798 Location:

Variable Format: character

Notes: UNF:6:65NYWxqRW31c4YpK3GSnQg==

Intensity

f7798 Location:

Variable Format: character

Notes: UNF:6:cXiF2+06hZWaVC3wKNmvcQ==

Intensity

f7798 Location:

Variable Format: character

Notes: UNF:6:kAQwfo72JKXiAOt7UrtzEg==

Intensity

f7798 Location:

Variable Format: character

Notes: UNF:6:O6x3siqjbvJVh9QBzbxHOQ==

Intensity

f7798 Location:

Variable Format: character

Notes: UNF:6:UV2Kx8Z3piCpzsKOr4Vbjw==

Intensity

f7798 Location:

Variable Format: character

Notes: UNF:6:J3QSSO2NH17cr/jrOl0cEA==

Intensity

f7798 Location:

Variable Format: character

Notes: UNF:6:SmzyEt/luXXwuzcO3HkAVw==

Intensity

f7798 Location:

Variable Format: character

Notes: UNF:6:SVxBssAudxsGP9LJRDIK7A==

Intensity

f7798 Location:

Variable Format: character

Notes: UNF:6:lx2qr3PPeAdAT9ZaSju7Ag==

Intensity

f7798 Location:

Variable Format: character

Notes: UNF:6:GlTDYZbsSMWW5LLuCtWV6g==

Intensity

f7798 Location:

Variable Format: character

Notes: UNF:6:20v+uXVcc97n444mmme/ng==

CantileverLength(um)

f7774 Location:

Summary Statistics: StDev 7.448568831062698; Valid 73.0; Max. 25.071736; Min. 0.0; Mean 12.427660493150684

Variable Format: numeric

Notes: UNF:6:98hNJPnWcMm8F6YlSm8x4A==

0V

f7774 Location:

Summary Statistics: Max. 578.587678; Min. 4.23341343; Mean 245.351918279863; StDev 171.14217036853083; Valid 73.0

Variable Format: numeric

Notes: UNF:6:ahSJAt9uhs7kQOwehjvNQQ==

Errorbar0V

f7774 Location:

Summary Statistics: Valid 73.0; Max. 28.9293839; StDev 8.557108518426542; Min. 0.2116706715; Mean 12.26759591399315

Variable Format: numeric

Notes: UNF:6:Ja1DfOOz7ArYAu4dHUBE2Q==

20V

f7774 Location:

Summary Statistics: StDev 144.00010091302855; Max. 487.612429; Min. 0.993887; Mean 202.55497897260273; Valid 73.0;

Variable Format: numeric

Notes: UNF:6:uJxLkwtx20WowLEcj/h6Xw==

Errorbar20V

f7774 Location:

Summary Statistics: StDev 7.200005045651429; Mean 10.127748948630138; Min. 0.04969435; Valid 73.0; Max. 24.38062145;

Variable Format: numeric

Notes: UNF:6:LVSisjQGwoxt/VgxRda+qA==

23V

f7774 Location:

Summary Statistics: StDev 115.33322542385321; Max. 397.904037; Min. 0.0135781; Mean 165.93887853835616; Valid 73.0

Variable Format: numeric

Notes: UNF:6:C9IAnP6HxgYyu0VyVZ8RAQ==

errorbar23V

f7774 Location:

Summary Statistics: StDev 5.7666612711926595; Max. 19.89520185; Mean 8.296943926917809; Min. 6.78905E-4; Valid 73.0;

Variable Format: numeric

Notes: UNF:6:gVFQ+IPu4OyFF2tBMW4ebg==

25V

f7774 Location:

Summary Statistics: StDev 80.11704012997696; Mean 120.8606397260274; Min. 0.985672; Max. 288.74697; Valid 73.0;

Variable Format: numeric

Notes: UNF:6:QuqBfxul5Ho1NsBPWu9vRA==

Errorbar25V

f7774 Location:

Summary Statistics: Max. 14.4373485; Valid 73.0; StDev 4.005852006498848; Mean 6.04303198630137; Min. 0.0492836

Variable Format: numeric

Notes: UNF:6:Yes3x0j99KvmAShIfYoExQ==

30V

f7774 Location:

Summary Statistics: StDev 32.48232580047994; Valid 73.0; Max. 21.58357; Min. -88.00729; Mean -48.96587240684932

Variable Format: numeric

Notes: UNF:6:YCvBUu81C7QycJhSHmkd3g==

Errorbar30V

f7774 Location:

Summary Statistics: Mean -2.448293620342466; StDev 1.624116290023997; Valid 73.0; Max. 1.0791785; Min. -4.4003645;

Variable Format: numeric

Notes: UNF:6:r84PjNmM4lxdxRPk0vivDg==